CPC H01L 27/14645 (2013.01) [H01L 27/1463 (2013.01); H01L 27/1464 (2013.01); H01L 27/14621 (2013.01); H01L 27/14629 (2013.01); H01L 27/14632 (2013.01); H01L 27/14687 (2013.01); H01L 27/14689 (2013.01)] | 20 Claims |
1. A back side illumination (BSI) image sensor comprising:
a substrate comprising a front side and a back side opposite to the front side;
a pixel sensor disposed in the substrate; and the pixel sensor comprising a plurality of first micro structures disposed over the back side of the substrate; and
a color filter disposed over the pixel sensor, and the color filter comprising a plurality of second micro structures disposed over the back side of the substrate,
wherein the first micro structures are arranged symmetrically to a first axial, and the second micro structures are arranged symmetrically to a second axial.
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