CPC H01L 21/76259 (2013.01) [B23K 26/0624 (2015.10); B23K 26/359 (2015.10); B23K 26/40 (2013.01); B23K 26/53 (2015.10); B28D 5/0005 (2013.01); B28D 5/0011 (2013.01); H01L 21/02002 (2013.01); H01L 21/268 (2013.01); H01L 21/76254 (2013.01); H01L 23/544 (2013.01); H01L 23/562 (2013.01); H01L 31/1892 (2013.01); H01L 31/1896 (2013.01); B23K 26/0006 (2013.01); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08); C30B 33/06 (2013.01); H01L 2223/5446 (2013.01); Y02E 10/50 (2013.01)] | 20 Claims |
1. A method for producing a layer of solid material, the method comprising:
providing a solid body having a first surface and a second surface opposite the first surface, the second surface being part of the layer of solid material;
generating defects by means of multiphoton excitation caused by at least one laser beam penetrating into the solid body via the second surface and acting in an inner structure of the solid body to generate a detachment plane, the detachment plane comprising regions with different concentrations of defects;
providing a polymer layer on the solid body; and
generating mechanical stress in the solid body such that a crack propagates in the solid body along the detachment plane and the layer of solid material separates from the solid body along the crack.
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