US 11,699,616 B2
Method for producing a layer of solid material
Wolfram Drescher, Dresden (DE); Jan Richter, Dresden (DE); and Christian Beyer, Freiberg (DE)
Assigned to Siltectra GmbH, Dresden (DE)
Filed by Siltectra GmbH, Dresden (DE)
Filed on Apr. 2, 2021, as Appl. No. 17/221,098.
Application 17/221,098 is a continuation of application No. 16/793,429, filed on Feb. 18, 2020, granted, now 11,004,723.
Application 16/793,429 is a continuation of application No. 16/378,902, filed on Apr. 9, 2019, granted, now 10,593,590, issued on Mar. 17, 2020.
Application 16/378,902 is a continuation of application No. 15/028,332, granted, now 10,312,135, issued on Jun. 4, 2019, previously published as PCT/EP2014/071512, filed on Oct. 8, 2014.
Claims priority of application No. 102013016666.7 (DE), filed on Oct. 8, 2013; and application No. 102014013107.6 (DE), filed on Sep. 3, 2014.
Prior Publication US 2021/0225694 A1, Jul. 22, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/76 (2006.01); H01L 21/762 (2006.01); B23K 26/359 (2014.01); H01L 31/18 (2006.01); B28D 5/00 (2006.01); H01L 21/268 (2006.01); B23K 26/40 (2014.01); H01L 21/02 (2006.01); B23K 26/53 (2014.01); B23K 26/0622 (2014.01); H01L 23/544 (2006.01); H01L 23/00 (2006.01); B23K 26/00 (2014.01); C30B 33/06 (2006.01); B23K 103/00 (2006.01)
CPC H01L 21/76259 (2013.01) [B23K 26/0624 (2015.10); B23K 26/359 (2015.10); B23K 26/40 (2013.01); B23K 26/53 (2015.10); B28D 5/0005 (2013.01); B28D 5/0011 (2013.01); H01L 21/02002 (2013.01); H01L 21/268 (2013.01); H01L 21/76254 (2013.01); H01L 23/544 (2013.01); H01L 23/562 (2013.01); H01L 31/1892 (2013.01); H01L 31/1896 (2013.01); B23K 26/0006 (2013.01); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08); C30B 33/06 (2013.01); H01L 2223/5446 (2013.01); Y02E 10/50 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for producing a layer of solid material, the method comprising:
providing a solid body having a first surface and a second surface opposite the first surface, the second surface being part of the layer of solid material;
generating defects by means of multiphoton excitation caused by at least one laser beam penetrating into the solid body via the second surface and acting in an inner structure of the solid body to generate a detachment plane, the detachment plane comprising regions with different concentrations of defects;
providing a polymer layer on the solid body; and
generating mechanical stress in the solid body such that a crack propagates in the solid body along the detachment plane and the layer of solid material separates from the solid body along the crack.