US 11,698,649 B2
Vaporization system and concentration control module used in the same
Toru Shimizu, Kyoto (JP)
Assigned to HORIBA STEC, CO., LTD., Kyoto (JP)
Filed by HORIBA STEC, CO., LTD., Kyoto (JP)
Filed on Aug. 23, 2021, as Appl. No. 17/409,041.
Claims priority of application No. 2020-142830 (JP), filed on Aug. 26, 2020.
Prior Publication US 2022/0066481 A1, Mar. 3, 2022
Int. Cl. G05D 11/13 (2006.01); G05D 7/06 (2006.01); G05D 21/02 (2006.01); G05D 16/20 (2006.01); C23C 16/448 (2006.01); H01L 21/67 (2006.01)
CPC G05D 11/138 (2013.01) [C23C 16/448 (2013.01); G05D 7/0623 (2013.01); G05D 11/132 (2013.01); G05D 16/2013 (2013.01); G05D 21/02 (2013.01); H01L 21/67253 (2013.01); H01L 21/67034 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A concentration control module used in a vaporization system configured to introduce a carrier gas into a liquid or solid source stored inside a tank, vaporize the source, and supply a source gas generated by the vaporization, the concentration control module comprising:
a concentration measurer configured to measure a concentration of the source gas;
a valve provided in a lead-out pipe configured to lead out the source gas from the tank;
a pressure target value calculator configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measurer;
a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculator; and
a valve controller configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.