CPC G05D 11/138 (2013.01) [C23C 16/448 (2013.01); G05D 7/0623 (2013.01); G05D 11/132 (2013.01); G05D 16/2013 (2013.01); G05D 21/02 (2013.01); H01L 21/67253 (2013.01); H01L 21/67034 (2013.01)] | 8 Claims |
1. A concentration control module used in a vaporization system configured to introduce a carrier gas into a liquid or solid source stored inside a tank, vaporize the source, and supply a source gas generated by the vaporization, the concentration control module comprising:
a concentration measurer configured to measure a concentration of the source gas;
a valve provided in a lead-out pipe configured to lead out the source gas from the tank;
a pressure target value calculator configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measurer;
a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculator; and
a valve controller configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.
|