| CPC G03F 7/70175 (2013.01) [G03F 7/702 (2013.01); G03F 7/70033 (2013.01); G03F 7/70925 (2013.01); G03F 7/70975 (2013.01); H05G 2/008 (2013.01)] | 20 Claims |
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16. A collector mirror for an extreme ultraviolet (EUV) light generator, the collector mirror comprising:
a first mirror in a vessel, the vessel being configured to receive a material and a laser beam to generate the EUV light;
a second mirror surrounding the first mirror; and
a detachable third mirror between the first mirror and the second mirror, the third mirror having an inner diameter that is substantially the same as an outer diameter of the first mirror, and an outer diameter that is substantially the same as an inner diameter of the second mirror,
wherein a combined structure of the first mirror, the second mirror, and the third mirror has a semi-spherical shape,
wherein the first mirror includes a first nozzle at an upper portion of an inner surface of the first mirror, the first nozzle being directed toward the first mirror,
wherein an upper end of an inner surface of the third mirror is at a lower height level than an upper end of an outer surface of the first mirror, such that an upper portion of the outer surface of the first mirror is exposed, and a second nozzle is positioned at the exposed upper portion of the outer surface of the first mirror to inject air toward the third mirror, and
wherein an upper end of an outer surface of the third mirror is at a higher height level than an upper end of an inner surface of the second mirror, such that an upper portion of the outer surface of the third mirror is exposed, and a third nozzle is positioned at the exposed upper portion of the outer surface of the third mirror to inject air toward the second mirror.
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