CPC G03F 1/80 (2013.01) [G03F 1/82 (2013.01); H01J 37/05 (2013.01); H01J 37/147 (2013.01); H01J 37/317 (2013.01); H01J 37/3171 (2013.01); H01L 21/02115 (2013.01); H01L 21/02274 (2013.01); H01L 21/26506 (2013.01); H01L 21/26513 (2013.01); H01L 21/26566 (2013.01); H01L 21/31105 (2013.01); H01L 21/31111 (2013.01); H05H 3/02 (2013.01); B24B 37/04 (2013.01); H01J 2237/0041 (2013.01); H01J 2237/0812 (2013.01); H01J 2237/15 (2013.01); H01L 29/36 (2013.01); Y10T 428/24355 (2015.01); Y10T 428/24479 (2015.01); Y10T 428/30 (2015.01)] | 10 Claims |
1. A method for preparing a biological material for implanting, said method comprising:
providing a reduced pressure chamber;
forming a first accelerated neutral beam within said reduced pressure chamber;
providing a holder within said reduced pressure chamber for holding a biological material;
positioning said biological material in said holder in said reduced pressure chamber; and
irradiating at least a first portion of a surface of said biological material with said first accelerated neutral beam, wherein said biological material undergoes a change in properties;
wherein the first accelerated neutral beam is separated from a first accelerated gas cluster ion beam.
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