US 11,698,582 B2
Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby
Joseph B. Khoury, Dedham, MA (US); Laurence B. Tarrant, Beverly Farms, MA (US); Sean R. Kirkpatrick, Littleton, MA (US); and Richard C. Svrluga, Billerica, MA (US)
Assigned to Exogenesis Corporation, Billerica, MA (US)
Filed by Exogenesis Corporation, Billerica, MA (US)
Filed on Jan. 3, 2019, as Appl. No. 16/239,272.
Application 14/238,752 is a division of application No. 13/215,514, filed on Aug. 23, 2011, granted, now 8,847,148, issued on Sep. 30, 2014.
Application 16/239,272 is a continuation in part of application No. 14/496,412, filed on Sep. 25, 2014, granted, now 10,409,155.
Application 14/496,412 is a continuation in part of application No. 14/238,752, abandoned, previously published as PCT/US2012/051690, filed on Aug. 21, 2012.
Claims priority of provisional application 61/526,179, filed on Aug. 22, 2011.
Claims priority of provisional application 61/490,675, filed on May 27, 2011.
Claims priority of provisional application 61/484,421, filed on May 10, 2011.
Claims priority of provisional application 61/473,359, filed on Apr. 8, 2011.
Claims priority of provisional application 61/376,225, filed on Aug. 23, 2010.
Prior Publication US 2019/0137868 A1, May 9, 2019
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/05 (2006.01); H01J 37/317 (2006.01); H01L 21/265 (2006.01); H01L 21/311 (2006.01); H01L 21/02 (2006.01); H05H 3/02 (2006.01); G03F 1/80 (2012.01); G03F 1/82 (2012.01); H01J 37/147 (2006.01); H01L 29/36 (2006.01); B24B 37/04 (2012.01)
CPC G03F 1/80 (2013.01) [G03F 1/82 (2013.01); H01J 37/05 (2013.01); H01J 37/147 (2013.01); H01J 37/317 (2013.01); H01J 37/3171 (2013.01); H01L 21/02115 (2013.01); H01L 21/02274 (2013.01); H01L 21/26506 (2013.01); H01L 21/26513 (2013.01); H01L 21/26566 (2013.01); H01L 21/31105 (2013.01); H01L 21/31111 (2013.01); H05H 3/02 (2013.01); B24B 37/04 (2013.01); H01J 2237/0041 (2013.01); H01J 2237/0812 (2013.01); H01J 2237/15 (2013.01); H01L 29/36 (2013.01); Y10T 428/24355 (2015.01); Y10T 428/24479 (2015.01); Y10T 428/30 (2015.01)] 10 Claims
OG exemplary drawing
 
1. A method for preparing a biological material for implanting, said method comprising:
providing a reduced pressure chamber;
forming a first accelerated neutral beam within said reduced pressure chamber;
providing a holder within said reduced pressure chamber for holding a biological material;
positioning said biological material in said holder in said reduced pressure chamber; and
irradiating at least a first portion of a surface of said biological material with said first accelerated neutral beam, wherein said biological material undergoes a change in properties;
wherein the first accelerated neutral beam is separated from a first accelerated gas cluster ion beam.