CPC G02B 21/06 (2013.01) [G02B 21/26 (2013.01); G02B 21/367 (2013.01)] | 14 Claims |
1. A device comprising:
a stage configured to hold a sample;
a light source configured to emit instantaneous light;
an objective lens disposed to face the sample on the stage;
a driver configured to move the sample in a scanning direction intersecting an optical axis of the objective lens at a predetermined speed;
a computer configured to set a plurality of lanes in an image acquisition region of the sample; and
an image sensor configured to capture an image of the sample in respective lanes by lane scanning and to acquire a plurality of tile images;
wherein the computer is configured to determine whether or not, the lane scanning with respect to the lane that acquired the tile images is re-executed, and wherein the computer is configured to re-execute the lane scanning based on a determination result.
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