CPC G01P 15/125 (2013.01) | 18 Claims |
1. A micromechanical device, comprising:
a semiconductor body;
a plurality of fixed electrodes on the semiconductor body;
a first mobile structure including:
a first mass having a first side opposite a second side, and a third side opposite a fourth side;
a first stopper element extending from a first corner of the first mass;
a second stopper element extending from a second corner of the first mass;
a third stopper element extending from a third corner of the first mass;
a fourth stopper element extending from a fourth corner of the first mass,
a first electrode extending from the first mass at the first side, the first electrode being between the first and second stopper element; and
a second electrode extending from the first mass at the second side, the second electrode being between the third and fourth stopper element; and
a second mobile structure including:
a second mass;
a central opening in the second mass, the first mass being in the central opening;
a first recess from the central opening to a first side of the second mass, the first stopper element extending into the first recess;
a second recess from the central opening to the first side of the second mass, the second stopper element extending into the second recess;
a third recess from the central opening to a second side opposite the first side of the second mass, the third stopper element extending into the third recess;
a fourth recess from the central opening to the second side of the second mass, the fourth stopper element extending into the fourth recess;
a fifth recess from the central opening to the first side of the second mass, the first electrode extending into the fifth recess and being between a first one and a second one of the plurality of fixed electrodes; and
a sixth recess from the central opening to the second side of the second mass, the second electrode extending into the sixth recess and being between a third one and a fourth one of the plurality of fixed electrodes.
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