US 11,698,303 B2
Method and system for analysing a chemical composition of a target using a Fabry-Perot interferometer
Jarkko Antila, Helsinki (FI); and Uula Kantojärvi, Helsinki (FI)
Assigned to Spectral Engines Oy, Helsinki (FI)
Filed by Spectral Engines Oy, Helsinki (FI)
Filed on Dec. 28, 2018, as Appl. No. 16/234,641.
Prior Publication US 2020/0209150 A1, Jul. 2, 2020
Int. Cl. G01J 3/26 (2006.01); G01N 21/31 (2006.01); G01J 3/45 (2006.01)
CPC G01J 3/26 (2013.01) [G01J 3/45 (2013.01); G01N 21/314 (2013.01); G01N 2021/3129 (2013.01); G01N 2201/1293 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for analyzing a chemical composition of a target, the method comprising:
placing only a single electrically tunable Fabry-Perot interferometer in a path of radiation emitted by only a single radiation source, wherein the radiation source is configured to provide optical inputs with a bandwidth of more than one free spectral range of the Fabry-Perot interferometer, wherein the Fabry-Perot interferometer is placed in the path of radiation prior to the target,
detecting the radiation, which has passed the Fabry-Perot interferometer simultaneously via multiple resonance peaks of different orders and which has passed or was reflected by the target, by a detector, and wherein detection is made such that multiple pass bands are allowed to be detected simultaneously, wherein the detector comprises only one pixel for detecting radiation,
scanning with varying air gaps of the Fabry-Perot interferometer to produce a continuous spectrum for the target, and
analyzing mixed signals of multiple resonance peaks of different orders by comparing detected radiation data with stored reference data of at least one known reference substance.