| CPC G01B 11/26 (2013.01) [G02B 27/14 (2013.01); G02B 27/30 (2013.01)] | 8 Claims |
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1. A high-stability nano-radian-order angle measuring device based on drift value feedback, comprising a first beam splitter, a collimator objective set, a plane mirror, a first LED light source, a second convex lens, a first multi-slit diaphragm, a second LED light source, a third convex lens, a second multi-slit diaphragm, a second beam splitter, a first deflecting mirror, a second deflecting mirror, a third beam splitter, a first linear array CCD, a second linear array CCD, a fourth beam splitter and a four-quadrant position detector, wherein the collimator objective set consists of a first convex lens and a first concave lens; light emitted by the first LED light source and the second LED light source is collimated by the second convex lens and the third convex lens, respectively, and is then incident in parallel to the first multi-slit diaphragm and the second multi-slit diaphragm; by taking the first multi-slit diaphragm and the second multi-slit diaphragm as object planes, two emitted light beams are gathered through the first beam splitter and are then split through the fourth beam splitter to be split into reflected light and transmitted light; the reflected light is perpendicularly incident upon the four-quadrant position detector; the transmitted light is reflected by the first deflecting mirror and the second deflecting mirror and is then perpendicularly incident upon the collimator objective set to be collimated into parallel light beams; the parallel light beams reflected by the plane mirror all return along their respective original paths, and are split by the third beam splitter after being reflected by the second beam splitter, one path is incident upon the first linear array CCD to be acquired for imaging, and one path is incident upon the second linear array CCD to be acquired for imaging;
the first multi-slit diaphragm consists of three parallel linear slits with equidistance and equal width, the light emitted by the first LED light source is irradiated on the first multi-slit diaphragm after being collimated by the second convex lens, and a light beam emitted by the first LED light source is a first beam of measuring light of the device; the second multi-slit diaphragm has the same structure as the first multi-slit diaphragm, but slit directions of the second multi-slit diaphragm and the first multi-slit diaphragm are perpendicular to each other, and a light beam emitted from the second multi-slit diaphragm is a second beam of measuring light of the device; or
the first multi-slit diaphragm consists of four parallel linear slits with equidistance and equal width, the light emitted by the first LED light source is irradiated on the first multi-slit diaphragm after being collimated by the second convex lens, and a light beam emitted by the first LED light source is a first beam of measuring light of the device; the second multi-slit diaphragm has the same structure as the first multi-slit diaphragm, but slit directions of the second multi-slit diaphragm and the first multi-slit diaphragm are perpendicular to each other, and a light beam emitted from the second multi-slit diaphragm is a second beam of measuring light of the device;
the first linear array CCD acquires the first beam of measuring light for imaging, a measuring direction of a sensor and the slit direction of the first multi-slit diaphragm are perpendicular to each other; the second linear array CCD acquires the second beam of measuring light for imaging, and a measuring direction of a sensor and the slit direction of the second multi-slit diaphragm are perpendicular to each other; and the first linear array CCD and the second linear array CCD are disposed at a focal plane of the collimator objective set, and are conjugate with the first multi-slit diaphragm and the second multi-slit diaphragm in positions;
after the four-quadrant position detector is disposed at the fourth beam splitter, a real-time drift value of the first beam of measuring light and the second beam of measuring light is acquired; and
the first deflecting mirror and the second deflecting mirror are placed parallel to each other.
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