US 11,697,887 B2
Multi-compartment electrochemical replenishment cell
Nolan L. Zimmerman, Kalispell, MT (US); Charles Sharbono, Whitefish, MT (US); Gregory J. Wilson, Kalispell, MT (US); Paul R. McHugh, Kalispell, MT (US); Paul Van Valkenburg, Whitefish, MT (US); Deepak Saagar Kalaikadal, Kalispell, MT (US); and Kyle M. Hanson, Kalispell, MT (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 23, 2020, as Appl. No. 17/78,413.
Prior Publication US 2022/0127747 A1, Apr. 28, 2022
Int. Cl. C25D 17/10 (2006.01); C25D 21/12 (2006.01); C25D 21/18 (2006.01); C25D 7/12 (2006.01); C25D 17/00 (2006.01)
CPC C25D 17/10 (2013.01) [C25D 7/123 (2013.01); C25D 17/001 (2013.01); C25D 17/002 (2013.01); C25D 21/12 (2013.01); C25D 21/18 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electroplating system comprising:
an electroplating chamber; and
a replenish assembly fluidly coupled with the electroplating chamber, the replenish assembly comprising:
an anolyte compartment housing anode material, the anolyte compartment having a first compartment section in which the anode material is housed and a second compartment section separated from the first compartment section by a divider, wherein the divider fluidly separates the first compartment section from the second compartment section,
a second compartment fluidly coupled with the electroplating chamber and electrically coupled with the anolyte compartment, wherein the second compartment includes a catholyte, and
a third compartment electrically coupled with the second compartment, the third compartment comprising an inert cathode.