US 11,697,879 B2
Methods for depositing sacrificial coatings on aerospace components
Sukti Chatterjee, San Jose, CA (US); Kenichi Ohno, Sunnyvale, CA (US); Lance A. Scudder, Sunnyvale, CA (US); Yuriy Melnik, San Jose, CA (US); David A. Britz, San Jose, CA (US); Pravin K. Narwankar, Sunnyvale, CA (US); Thomas Knisley, Livonia, MI (US); Mark Saly, Santa Clara, CA (US); and Jeffrey Anthis, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 4, 2019, as Appl. No. 16/560,838.
Claims priority of provisional application 62/861,925, filed on Jun. 14, 2019.
Prior Publication US 2020/0392626 A1, Dec. 17, 2020
Int. Cl. C23C 16/56 (2006.01); C23C 16/40 (2006.01); C22C 19/03 (2006.01)
CPC C23C 16/56 (2013.01) [C22C 19/03 (2013.01); C23C 16/405 (2013.01)] 20 Claims
 
1. A method for producing a protective coating on an aerospace component, comprising:
depositing a metal oxide template layer comprising chromium oxide on the aerospace component comprising nickel and aluminum by an atomic layer deposition (ALD) process or a chemical vapor deposition (CVD) process, wherein the metal oxide template layer further comprises tungsten oxide, molybdenum oxide, vanadium oxide, or any combination thereof; and
heating the aerospace component containing the metal oxide template layer during a thermal process comprising:
diffusing aluminum contained within the aerospace component towards a surface of the aerospace component containing the metal oxide template layer;
oxidizing the diffused aluminum to produce an aluminum oxide layer disposed between the aerospace component and the metal oxide template layer, wherein the aluminum oxide layer comprises α-Al2O3, wherein the metal oxide template layer and the aluminum oxide layer have a corundum crystal structure, and wherein the metal oxide template layer and the aluminum oxide layer have crystal structures with a lattice mismatch of about 0.1% to about 10%; and
removing at least a portion of the metal oxide template layer while leaving the aluminum oxide layer by converting the chromium oxide to chromium oxide hydroxide during the thermal process.