US 11,697,754 B2
Thermal conductive layer, photosensitive layer, photosensitive composition, manufacturing method for thermal conductive layer, and laminate and semiconductor device
Kosuke Yamashita, Shizuoka (JP); and Kazuto Shimada, Shizuoka (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Oct. 15, 2020, as Appl. No. 17/72,001.
Application 17/072,001 is a continuation of application No. PCT/JP2019/016086, filed on Apr. 15, 2019.
Claims priority of application No. 2018-081904 (JP), filed on Apr. 20, 2018; application No. 2018-185069 (JP), filed on Sep. 28, 2018; and application No. 2019-041304 (JP), filed on Mar. 7, 2019.
Prior Publication US 2021/0040370 A1, Feb. 11, 2021
Int. Cl. C09K 5/14 (2006.01); C08K 3/04 (2006.01); C08K 3/22 (2006.01); C08K 3/28 (2006.01); C08K 3/34 (2006.01); C08K 3/38 (2006.01); C08K 7/04 (2006.01); C08K 9/02 (2006.01); H01L 23/373 (2006.01); G03F 7/32 (2006.01)
CPC C09K 5/14 (2013.01) [C08K 3/042 (2017.05); C08K 3/22 (2013.01); C08K 3/28 (2013.01); C08K 3/34 (2013.01); C08K 3/38 (2013.01); C08K 7/04 (2013.01); C08K 9/02 (2013.01); H01L 23/3737 (2013.01); C08K 2003/2227 (2013.01); C08K 2003/2241 (2013.01); C08K 2003/282 (2013.01); C08K 2003/385 (2013.01); C08K 2201/001 (2013.01); C08K 2201/005 (2013.01); C08K 2201/016 (2013.01); G03F 7/322 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A thermal conductive layer comprising:
at least one filler,
wherein the thermal conductive layer has a thermal diffusivity of 5.0×10−7 m2s−1 or more and a volume resistivity of 1.0×1011 Ω·cm or more,
wherein the thermal conductive layer is formed of a photosensitive layer comprising the at least one filler and a photosensitive material,
wherein a content of the at least one filler of the photosensitive layer is 70% by mass or less with respect to the total mass of the photosensitive layer,
wherein the filler has an aspect ratio of 5 or more,
wherein a content of the at least one filler of the photosensitive layer is 20% to 60% by volume with respect to the total volume of the photosensitive layer.