US 11,697,583 B2
Micromechanical device including a stop spring structure
Cristian Nagel, Reutlingen (DE); Johannes Classen, Reutlingen (DE); Rolf Scheben, Reutlingen (DE); and Rudy Eid, Stuttgart (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Apr. 7, 2021, as Appl. No. 17/224,613.
Claims priority of application No. 102020204767.7 (DE), filed on Apr. 15, 2020.
Prior Publication US 2021/0323809 A1, Oct. 21, 2021
Int. Cl. B81B 7/00 (2006.01); B81B 3/00 (2006.01)
CPC B81B 3/0027 (2013.01) 7 Claims
OG exemplary drawing
 
1. A micromechanical device, comprising:
a substrate including a substrate surface in parallel to a main extension plane;
a movable mass situated movably above the substrate surface in relation to the substrate; and
a stop spring structure which includes a stop, the stop spring structure being connected to the movable mass, and the stop is configured to strike against the substrate surface in the event of a deflection of the movable mass in a z direction, perpendicular to the main extension plane, the stop spring structure, at the location of the stop, includes a first spring constant in the z direction, includes a second spring constant in an x direction, in parallel to the main extension plane, and includes a third spring constant in a y direction, in parallel to the main extension plane and perpendicular to the x direction, the first spring constant being greater than the second spring constant and/or being greater than the third spring constant.