CPC B81B 3/0027 (2013.01) | 7 Claims |
1. A micromechanical device, comprising:
a substrate including a substrate surface in parallel to a main extension plane;
a movable mass situated movably above the substrate surface in relation to the substrate; and
a stop spring structure which includes a stop, the stop spring structure being connected to the movable mass, and the stop is configured to strike against the substrate surface in the event of a deflection of the movable mass in a z direction, perpendicular to the main extension plane, the stop spring structure, at the location of the stop, includes a first spring constant in the z direction, includes a second spring constant in an x direction, in parallel to the main extension plane, and includes a third spring constant in a y direction, in parallel to the main extension plane and perpendicular to the x direction, the first spring constant being greater than the second spring constant and/or being greater than the third spring constant.
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