US 11,697,582 B2
MEMS transducer
Stephane Leahy, Montreal (CA); Wan-Thai Hsu, Saline, MI (US); Mohsin Nawaz, Ann Arbor, MI (US); Carly Stalder, Montreal (CA); Sahil Gupta, Montreal (CA); and Meysam Daeichin, Sunnyvale, CA (US)
Assigned to Soundskrit Inc., Montreal (CA)
Filed by Soundskrit Inc., Montreal (CA)
Filed on Jun. 14, 2022, as Appl. No. 17/840,131.
Claims priority of provisional application 63/280,003, filed on Nov. 16, 2021.
Claims priority of provisional application 63/210,183, filed on Jun. 14, 2021.
Prior Publication US 2022/0396470 A1, Dec. 15, 2022
Int. Cl. B81B 3/00 (2006.01); B81B 7/02 (2006.01); H04R 19/04 (2006.01)
CPC B81B 3/0021 (2013.01) [B81B 7/02 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0172 (2013.01); B81B 2203/056 (2013.01); B81B 2203/06 (2013.01); H04R 2201/003 (2013.01)] 30 Claims
OG exemplary drawing
 
1. A microelectromechanical system (MEMS) transducer comprising:
a substrate; and
a pair of electrodes supported by the substrate, the pair of electrodes being configured as a bias electrode-sense electrode couple;
wherein:
a moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode;
the pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction;
the moveable electrode comprises a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction; and
the resting deflection is greater than a thickness of a fixed electrode of the pair of electrodes.