CPC B81B 3/0021 (2013.01) [B81B 7/02 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0172 (2013.01); B81B 2203/056 (2013.01); B81B 2203/06 (2013.01); H04R 2201/003 (2013.01)] | 30 Claims |
1. A microelectromechanical system (MEMS) transducer comprising:
a substrate; and
a pair of electrodes supported by the substrate, the pair of electrodes being configured as a bias electrode-sense electrode couple;
wherein:
a moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode;
the pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction;
the moveable electrode comprises a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction; and
the resting deflection is greater than a thickness of a fixed electrode of the pair of electrodes.
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