US 11,697,135 B2
Multi-frequency hybrid piezo actuation and capactive transducer
Mohammad Hadi Motieian Najar, Santa Clara, CA (US); and Peter Smeys, San Jose, CA (US)
Assigned to Texas Instruments Incorporated, Dallas, TX (US)
Filed by Texas Instruments Incorporated, Dallas, TX (US)
Filed on Nov. 9, 2018, as Appl. No. 16/186,072.
Prior Publication US 2020/0147642 A1, May 14, 2020
Int. Cl. B06B 1/06 (2006.01); B06B 1/02 (2006.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01); H10N 30/00 (2023.01)
CPC B06B 1/0622 (2013.01) [B06B 1/0215 (2013.01); H10N 30/1071 (2023.02); H10N 30/87 (2023.02); H10N 30/88 (2023.02)] 17 Claims
OG exemplary drawing
 
1. A transducer, comprising:
a first piezoelectric stack comprising a piezoelectric material;
a first layer in contact with the piezoelectric stack; and
a base structure beneath the first layer, wherein the transducer is configured to have:
a gap between the first layer and a first portion of the base structure in an absence of a first bias voltage; and
contact between the first layer and the first portion of base structure responsive to the first bias voltage.