	US 12,356,858 B2
	Method for the production of a single-crystal film, in particular piezoelectric
Bruno Ghyselen, Seyssinet (FR); and Jean-Marc Bethoux, La Buisse (FR)
Assigned to Soitec, Bernin (FR)
Filed by Soitec, Bernin (FR)
Filed on Aug. 6, 2021, as Appl. No. 17/396,374.
Application 17/396,374 is a division of application No. 16/064,416, granted, now 11,101,428, previously published as PCT/EP2016/082245, filed on Dec. 21, 2016.
Claims priority of application No. 1563055 (FR), filed on Dec. 22, 2015.
Prior Publication US 2021/0367139 A1, Nov. 25, 2021
Int. Cl. H10N 30/093 (2023.01); C01G 31/02 (2006.01); C01G 33/00 (2006.01); C01G 35/00 (2006.01); C30B 25/18 (2006.01); C30B 29/22 (2006.01); C30B 29/30 (2006.01); H01L 21/762 (2006.01); H03H 9/02 (2006.01); H03H 9/54 (2006.01); H03H 9/64 (2006.01); H10N 30/072 (2023.01); H10N 30/076 (2023.01); H10N 30/079 (2023.01); H10N 30/853 (2023.01)

CPC H10N 30/093 (2023.02) [C30B 25/186 (2013.01); C30B 29/22 (2013.01); C30B 29/30 (2013.01); H01L 21/76254 (2013.01); H03H 9/02031 (2013.01); H03H 9/02574 (2013.01); H03H 9/54 (2013.01); H03H 9/64 (2013.01); H10N 30/072 (2023.02); H10N 30/079 (2023.02); H10N 30/8542 (2023.02); C01G 31/02 (2013.01); C01G 33/00 (2013.01); C01G 35/00 (2013.01); H10N 30/076 (2023.02)]

20 Claims

1. A substrate for a microelectronic, photonic or optical device, comprising:

a support substrate; and

a monocrystalline layer of composition A″B″O₃on the support substrate, wherein:

A″ consists of one or more elements selected from the group consisting of: Li, Na, K, and H;

B″ consists of one or more elements selected from the group consisting of: Nb, Ta, Sb, and V; and

at least one of A″ and B″ consists of at least two elements; and

a layer of composition A′B′O₃between the support substrate and the layer of composition A″B″O₃, wherein:

A′ consists of at least one element selected from the group consisting of: Li, Na, K, and H, and

B′ consists of at least one element selected from the group consisting of: Nb, Ta, Sb, and V.