US 12,356,746 B2
Photoelectric conversion apparatus and equipment
Kenji Togo, Kanagawa (JP); Hideaki Ishino, Tokyo (JP); and Yoshiyuki Hayashi, Tokyo (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Apr. 7, 2021, as Appl. No. 17/224,988.
Claims priority of application No. 2020-072882 (JP), filed on Apr. 15, 2020.
Prior Publication US 2021/0327939 A1, Oct. 21, 2021
Int. Cl. H10F 39/00 (2025.01); H10F 39/18 (2025.01)
CPC H10F 39/8057 (2025.01) [H10F 39/024 (2025.01); H10F 39/182 (2025.01); H10F 39/8053 (2025.01); H10F 39/8063 (2025.01); H10F 39/811 (2025.01)] 34 Claims
OG exemplary drawing
 
1. An apparatus including a light-receiving pixel region and a light-shielded region, the apparatus comprising:
a photoelectric conversion layer including a plurality of photoelectric conversion portions;
a light-shielding portion over the photoelectric conversion layer in the light-receiving pixel region, the light-shielding portion surrounding each light-transmitting portion as an optical path for light incident on each of the plurality of photoelectric conversion portions in the light-receiving pixel region; and
a light-shielding film along a principal surface of the photoelectric conversion layer, the light-shielding film being over the photoelectric conversion layer in the light-shielded region,
wherein the light-shielding portion includes a lower end and an upper end, and the lower end is an end nearer the photoelectric conversion layer than the upper end in a first direction perpendicular to the principal surface of the photoelectric conversion layer, and the upper end is an end opposite to the lower end of the light-shielding portion in the first direction, and the light-shielding portion extends from the lower end to the upper end,
wherein the light-shielding film includes a lower surface and an upper surface, and the lower surface is a surface nearer the photoelectric conversion layer than the upper surface in the first direction, and the upper surface is a surface opposite to the lower surface of the light-shielding film in the first direction,
wherein a distance in the first direction between the upper end of the light-shielding portion and the principal surface of the photoelectric conversion layer is larger than a distance in the first direction between the lower surface of the light-shielding film and the principal surface of the photoelectric conversion layer,
wherein a distance in the first direction between the lower end of the light-shielding portion and the principal surface of the photoelectric conversion layer is smaller than the distance in the first direction between the lower surface of the light-shielding film and the principal surface of the photoelectric conversion layer,
wherein in a plane including the light-shielding film and the light-shielding portion, a plurality of openings each defined by the light-shielding portion and a gap between the light-shielding portion and the light-shielding film are provided,
wherein a width of the gap in a second direction in which one of the plurality of openings and the gap are arranged side by side is smaller than a width of one of the plurality of openings in the second direction,
wherein a width of the light-shielding portion between the plurality of openings which are adjacent to each other in the second direction is smaller than a width of the light-shielding film in the second direction.