| CPC H10D 62/021 (2025.01) [H10D 30/0227 (2025.01); H10D 30/601 (2025.01); H10D 62/151 (2025.01); H10D 64/015 (2025.01)] | 5 Claims |

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1. A semiconductor device, comprising:
a gate structure on a substrate;
a spacer adjacent to the gate structure;
an epitaxial layer adjacent to the spacer, wherein the epitaxial layer comprises a hexagon;
a protrusion having an angle greater than 30 degrees and less than 90 degrees under the spacer and adjacent to the hexagon and contacting a bottom surface of the spacer directly, wherein the protrusion is made of a single material and the protrusion and the epitaxial layer are made of same material; and
a cap layer on the epitaxial layer.
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