US 12,356,508 B2
Heater temperature control method, heater, and placement stand
Shigeru Kasai, Yamanashi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Appl. No. 17/425,285
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
PCT Filed Jan. 16, 2020, PCT No. PCT/JP2020/001257
§ 371(c)(1), (2) Date Jul. 22, 2021,
PCT Pub. No. WO2020/153224, PCT Pub. Date Jul. 30, 2020.
Claims priority of application No. 2019-011538 (JP), filed on Jan. 25, 2019.
Prior Publication US 2022/0151026 A1, May 12, 2022
Int. Cl. H05B 3/03 (2006.01); H01L 21/02 (2006.01); H05B 3/74 (2006.01)
CPC H05B 3/03 (2013.01) [H01L 21/02 (2013.01); H05B 3/74 (2013.01); H05B 2213/07 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A method of controlling a temperature of a heater that includes a single plate-shaped member formed of a semiconductor substrate, and a set of three or more electrodes formed on a side surface of the single plate-shaped member while being spaced apart from each other in a circumference direction, wherein the single plate-shaped member is divided into a plurality of concentric regions that include a first concentric region and a second concentric region that surrounds the first concentric region, the method comprising:
heating the first concentric region of the single plate-shaped member by sequentially driving each of a plurality of first sets of conducting electrodes that are associated with the first concentric region where each first set of conducting electrodes conducts conducting current between conducting electrodes included in the first set, the plurality of first sets of conducting electrodes from the set of three or more electrodes and each of the plurality of first sets of conducting electrodes having a first number of conducting, and
heating the second concentric region by sequentially driving each of a plurality of second sets of conducting electrodes that are associated with the second concentric region where each second set of conducting electrodes conducts current between conducting electrodes included in the second set, the plurality of second sets of conducting electrodes from the set of three or more electrodes and each of the plurality of second sets of conducting electrodes having a second number of conducting electrodes that is different from the first number of conducting electrodes,
wherein a first conducting time period for conducting the current between the conducting electrodes included in the plurality of first sets of conducting electrodes is set and a second conducting time period for conducting the current between the conducting electrodes included in the plurality of second sets of conducting electrodes is set.