US 12,355,427 B2
Acoustic wave device
Takashi Yamane, Nagaokakyo (JP); and Yuta Ishii, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jan. 13, 2023, as Appl. No. 18/096,614.
Application 18/096,614 is a continuation of application No. PCT/JP2021/025976, filed on Jul. 9, 2021.
Claims priority of provisional application 63/052,144, filed on Jul. 15, 2020.
Prior Publication US 2023/0141873 A1, May 11, 2023
Int. Cl. H03H 9/58 (2006.01); H03H 9/13 (2006.01); H03H 9/205 (2006.01); H03H 9/60 (2006.01)
CPC H03H 9/587 (2013.01) [H03H 9/133 (2013.01); H03H 9/205 (2013.01); H03H 9/605 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a support substrate;
a piezoelectric layer on the support substrate;
a functional electrode on the piezoelectric layer; and
first and second electrode films positioned on the piezoelectric layer to face each other and having different potentials from each other; wherein
a thickness of the piezoelectric layer in at least a portion of a region overlapping the first electrode film in plan view is different from a thickness of the piezoelectric layer in at least a portion of a region not overlapping the first electrode film in plan view;
the functional electrode includes at least one pair of electrodes facing each other, and each of the at least one pair of electrodes is disposed between the first and second electrode films in plan view;
the at least one pair of electrodes include a first electrode finger and a second electrode finger; and
an end of the first electrode finger is connected to the first electrode film, and an end of the second electrode finger is connected to the second electrode film.