US 12,355,367 B2
Wideband RF power supply and control method
Itsuo Yuzurihara, Yokohama (JP); Tomohiro Yoneyama, Yokohama (JP); Shohei Kobayashi, Yokohama (JP); and Yu Hosoyamada, Yokohama (JP)
Assigned to KYOSAN ELECTRIC MFG. CO., LTD., Yokohama (JP)
Appl. No. 18/276,940
Filed by KYOSAN ELECTRIC MFG. CO., LTD., Yokohama (JP)
PCT Filed Dec. 17, 2021, PCT No. PCT/JP2021/046851
§ 371(c)(1), (2) Date Aug. 11, 2023,
PCT Pub. No. WO2022/176368, PCT Pub. Date Aug. 25, 2022.
Claims priority of application No. 2021-026580 (JP), filed on Feb. 22, 2021.
Prior Publication US 2024/0048041 A1, Feb. 8, 2024
Int. Cl. H02M 7/5395 (2006.01); H02M 1/12 (2006.01); H02M 7/5387 (2007.01); H02M 1/00 (2006.01)
CPC H02M 7/5395 (2013.01) [H02M 1/12 (2013.01); H02M 1/0054 (2021.05); H02M 7/5387 (2013.01)] 14 Claims
OG exemplary drawing
 
10. A control method for a wideband RF power supply that compares a modulation wave with a carrier wave in a PWM inverter to variably output a sine wave output frequency in an RF band,
wherein generation of the carrier wave comprises:
(a) a carrier wave upper and lower limit frequency setting step for setting an upper limit frequency and a lower limit frequency of the carrier wave;
(b) a modulation wave frequency section setting step for dividing a whole modulation wave variable frequency range into sections to set a plurality of modulation wave frequency sections, each of which is associated with each number of PWM pulses N;
(c) a carrier wave frequency computing step for changing to a number of PWM pulses N that is associated with a modulation wave frequency section which includes the modulation wave frequency fs in a modulation wave frequency fs, and computing a carrier wave frequency fc by using the changed number of PWM pulses N and the variable modulation wave frequency fs based on a relationship of fc=N·fs;
(d) a carrier wave outputting step for outputting a carrier wave at the carrier wave frequency fc computed in the carrier wave frequency computing step;
(e) a PWM pulse outputting step for comparing a modulation wave at the modulation wave frequency fs with the carrier wave output in the carrier wave outputting step, so as to output a PWM pulse for performing PWM control on the PWM inverter; and
(f) an outputting step for outputting a sine wave having an output frequency corresponding to the modulation wave frequency fs.