| CPC H01L 25/0655 (2013.01) [H01L 23/5226 (2013.01); H01L 23/5384 (2013.01); H01L 24/13 (2013.01); H01L 2225/06541 (2013.01)] | 20 Claims | 

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               1. An integrated circuit assembly, comprising: 
            a first integrated circuit chip comprising: 
                a bulk silicon substrate; 
                  transistor devices on the bulk silicon substrate; 
                  a first group of interconnect levels on the transistor devices; 
                  a second group of interconnect levels on the first group of interconnect levels; and 
                  through silicon vias in the bulk silicon substrate and in the first group of interconnect levels but not in the second group of interconnect levels, wherein the second group of interconnect levels covers the through silicon vias; and 
                a second integrated circuit chip mounted on the first integrated circuit chip, the second integrated circuit chip having an area smaller than and within an area of the first integrated circuit chip, and the second integrated circuit chip electrically coupled to the through silicon vias of the first integrated circuit chip. 
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