US 12,354,903 B2
Deposition apparatus and display panel manufacturing apparatus including the same
Gyungmin Baek, Yongin-si (KR); Hyunah Sung, Suwon-si (KR); Hyuneok Shin, Gwacheon-si (KR); Namwook Kang, Hwaseong-si (KR); Dooseon Yu, Cheonan-si (KR); and You Jong Lee, Seoul (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Aug. 16, 2021, as Appl. No. 17/402,923.
Claims priority of application No. 10-2020-0171107 (KR), filed on Dec. 9, 2020.
Prior Publication US 2022/0181196 A1, Jun. 9, 2022
Int. Cl. H01L 21/687 (2006.01); C23C 14/50 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68785 (2013.01) [C23C 14/50 (2013.01); H01L 21/6833 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A deposition apparatus comprising:
a susceptor provided with a plurality of susceptor holes defined therein;
an electrostatic chuck disposed on the susceptor and provided with a plurality of electrostatic chuck holes defined therein; and
a plurality of pins penetrating through an entirety of both the susceptor and the electrostatic chuck to connect the susceptor and the electrostatic chuck, each of the pins comprising:
a first portion disposed in a corresponding electrostatic chuck hole of the plurality of electrostatic chuck holes; and
a second portion disposed in a corresponding susceptor hole of the plurality of susceptor holes, the first portion comprising:
a first base portion;
a first cooler disposed in the first base portion;
a plurality of pin insulating layers; and
a plurality of pin electrodes disposed between the pin insulating layers, wherein the plurality of pins are driven.