US 12,354,901 B2
Stage and manufacturing method thereof
Hibiki Yokoyama, Yokohama (JP); Naoya Kida, Yokohama (JP); Jun Futakuchiya, Yokohama (JP); Noriyoshi Kaneda, Yokohama (JP); and Michiyoshi Sone, Yokohama (JP)
Assigned to NHK SPRING CO., LTD., Yokohama (JP)
Filed by NHK SPRING CO., LTD., Yokohama (JP)
Filed on Mar. 1, 2023, as Appl. No. 18/176,749.
Application 18/176,749 is a continuation of application No. PCT/JP2021/029390, filed on Aug. 6, 2021.
Claims priority of application No. 2020-150843 (JP), filed on Sep. 8, 2020.
Prior Publication US 2023/0207286 A1, Jun. 29, 2023
Int. Cl. H01L 21/683 (2006.01); C23C 4/11 (2016.01); H01J 37/32 (2006.01)
CPC H01L 21/6833 (2013.01) [C23C 4/11 (2016.01); H01J 37/32715 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A stage comprising:
a base material comprising a step portion, the step portion comprising:
a first surface recessed from a top surface of the base material; and
a second surface recessed from a side surface of the base material; and
an insulating film comprising a plurality of first layers on the first surface and a plurality of second layers on the second surface,
wherein in the step portion, each first end portion of the plurality of first layers and each second end portion of the plurality of second layers are alternately stacked.