US 12,354,893 B2
Fixture and method for determining position of a target in a reaction chamber
Siyao Luan, Phoenix, AZ (US); Peipei Gao, Chandler, AZ (US); Xing Lin, Chandler, AZ (US); Alexandros Demos, Scottsdale, AZ (US); and Kishor Patil, Chandler, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Dec. 13, 2021, as Appl. No. 17/549,311.
Claims priority of provisional application 63/126,176, filed on Dec. 16, 2020.
Prior Publication US 2022/0189804 A1, Jun. 16, 2022
Int. Cl. H01L 21/67 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67259 (2013.01) [C23C 16/455 (2013.01); C23C 16/4582 (2013.01); C23C 16/52 (2013.01); H01L 21/68742 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A fixture, comprising:
a frame configured for fixation above a reaction chamber, the reaction chamber configured to deposit a film onto a substrate;
a leveling plate supported on the frame;
a bracket supported on the leveling plate; and
a laser profiler suspended from the bracket and overlaying the reaction chamber, wherein the laser profiler has a field of view extending through the leveling plate and the frame to determine position of a target within the reaction chamber,
wherein the frame comprises:
a first stringer;
a second stringer offset from the first stringer; and
a plurality of joists extending between the first stringer and the second stringer, wherein the first stringer and the second stringer longitudinally span the reaction chamber.