US 12,354,869 B2
Substrate treatment method and substrate treatment apparatus
Yuji Nagashima, Yokohama (JP)
Assigned to SHIBAURA MECHATRONICS CORPORATION, Kanagawa (JP)
Filed by Shibaura Mechatronics Corporation, Yokohama (JP)
Filed on Jul. 12, 2021, as Appl. No. 17/372,931.
Claims priority of application No. 2020-129286 (JP), filed on Jul. 30, 2020.
Prior Publication US 2022/0037149 A1, Feb. 3, 2022
Int. Cl. H01L 21/02 (2006.01); A46B 9/00 (2006.01); A46B 13/00 (2006.01); A46B 13/02 (2006.01); B08B 1/12 (2024.01); B08B 1/32 (2024.01); H01L 21/67 (2006.01)
CPC H01L 21/02096 (2013.01) [A46B 9/005 (2013.01); A46B 13/008 (2013.01); A46B 13/02 (2013.01); B08B 1/12 (2024.01); B08B 1/32 (2024.01); H01L 21/67046 (2013.01); A46B 2200/3073 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A substrate treatment apparatus removing an upper end of a protrusion in a substrate, an unevenness being formed on a surface of the substrate, the apparatus comprising:
a first supplier configured to supply a first liquid onto the surface of the substrate to form a protective layer on the surface of the substrate;
a second supplier configured to supply a second liquid onto the protective layer covering the surface of the substrate, the second liquid being capable of dissolving the upper end of the protrusion;
a removal part configured to physically remove a portion of the protective layer being on the upper end of the protrusion to bring the second liquid into contact with the upper end of the protrusion, thereby dissolving the upper end of the protrusion with the second liquid;
a third supplier configured to supply a third liquid capable of dissolving the protective layer onto the surface of the substrate to remove a remaining portion of the protective layer not previously removed by the removal part; and
a controller controlling the first supplier, the second supplier, the removal part, and the third supplier, the controller being configured to perform following steps;
a step of controlling the first supplier to supply the first liquid to the surface of the substrate on which the irregularities being formed;
a step of controlling the second supplier to supply the second liquid onto the protective layer formed by the first liquid;
a step of controlling the removal part to physically remove the portion of the protective layer on the upper end of the protrusion, thereby bringing the second liquid into contact with the upper end of the protrusion and dissolving the upper end of the protrusion with the second liquid; and
a step of controlling the third supplier to supply the third liquid to the surface on which the unevenness being formed so as to remove a remaining portion of the protective layer that has not been removed by the removal part.