US 12,354,855 B2
Process kits and related methods for processing chambers to facilitate deposition process adjustability
Zhepeng Cong, San Jose, CA (US); Ala Moradian, Sunnyvale, CA (US); Tao Sheng, Santa Clara, CA (US); Nimrod Smith, Cupertino, CA (US); Ashur J. Atanos, San Jose, CA (US); and Vinh N. Tran, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 22, 2022, as Appl. No. 17/871,505.
Claims priority of provisional application 63/346,681, filed on May 27, 2022.
Prior Publication US 2023/0386803 A1, Nov. 30, 2023
Int. Cl. H01J 37/32 (2006.01); C23C 14/56 (2006.01); C23C 16/458 (2006.01); C30B 25/10 (2006.01); C30B 25/12 (2006.01); C30B 25/14 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/32834 (2013.01) [C23C 14/564 (2013.01); C23C 16/4585 (2013.01); C30B 25/10 (2013.01); C30B 25/12 (2013.01); C30B 25/14 (2013.01); H01J 37/32477 (2013.01); H01L 21/02057 (2013.01); H01L 21/67051 (2013.01); H01L 21/68735 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A process chamber including a flow guide, the flow guide comprising:
a plate having:
a first face and a second face opposing the first face; and
a first end and a second end opposite of the first end;
a first fin set extending from the second face, the first fin set having:
a plurality of linear sections, the plurality of linear sections having a first outer linear section, a second outer linear section, and a plurality of middle linear sections disposed between the first outer linear section and the second outer linear section, the first outer linear section disposed at a first distance relative to the first end of the plate and the second outer linear section disposed at a second distance relative to the second end of the plate, wherein the second distance is equal to or larger than the first distance; and
a plurality of arcuate sections, the plurality of arcuate sections having a first outer arcuate section, a second outer arcuate section, and a plurality of middle arcuate sections disposed between the first outer arcuate section and the second outer arcuate section, wherein the plurality of linear sections intersects the plurality of arcuate sections;
a second fin set extending from the second face, the second fin set having:
a plurality of linear sections, the plurality of linear sections having a first outer linear section, a second outer linear section, and a plurality of middle linear sections disposed between the first outer linear section and the second outer linear section; and
a plurality of arcuate sections, the plurality of arcuate sections comprises a first outer arcuate section, a second outer arcuate section, and a plurality of middle arcuate sections disposed between the first outer arcuate section and the second outer arcuate sections, the plurality of linear sections intersecting the plurality of arcuate sections; and
wherein the second fin set is spaced from the first fin set to define a flow path between the first fin set and the second fin set, the flow path disposed between the first outer linear section of the first fin set and the first outer linear section of the second fin set and the second outer linear section of the first fin set and the second outer linear section of the second fin set, the flow path having a serpentine pattern therebetween.