| CPC H01J 37/32541 (2013.01) [H01J 37/32348 (2013.01); H01J 37/3244 (2013.01); H01J 37/3255 (2013.01); H01J 2237/327 (2013.01)] | 9 Claims |
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1. An active gas generation apparatus generating active gas obtained by activating material gas supplied to a discharge space, comprising:
a first electrode constituting part; and
a second electrode constituting part provided on a lower side of the first electrode constituting part, wherein
the first electrode constituting part includes a first electrode dielectric film and a plurality of first metal electrodes formed on an upper surface of the first electrode dielectric film,
the second electrode constituting part includes a second electrode dielectric film and a plurality of second metal electrodes formed on a lower surface of the second electrode dielectric film,
alternating voltage is applied to the plurality of first metal electrodes, and the plurality of second metal electrodes are set to have reference potential,
the first electrode dielectric film includes a plurality of gas supply regions disposed along a first direction, the plurality of gas supply regions include a plurality of gas supply holes at regular intervals along a second direction, and the second direction intersects with the first direction,
the plurality of first metal electrodes are disposed along the first direction, and each of the plurality of first metal electrodes is formed to extend in the second direction,
the second electrode dielectric film includes a plurality of discharge area formation regions disposed along the first direction, each of the plurality of discharge area formation regions includes a concave region concaved from a surface of the second electrode dielectric film, and is provided to extend in the second direction, a plurality of gas ejection holes are provided on a lower side of each of the plurality of discharge area formation regions, and the plurality of gas ejection holes are provided at regular intervals along the second direction,
the plurality of second metal electrodes are disposed along the first direction, and each of the plurality of second metal electrodes is formed to extend in the second direction,
the discharge space includes a plurality of discharge spaces,
the plurality of first metal electrodes, the plurality of gas supply regions, the plurality of second metal electrodes, the plurality of discharge area formation regions, and the plurality of discharge spaces correspond to each other on a one-to-one basis,
a first metal electrode, a second metal electrode, a gas supply region, a discharge area formation region, and a discharge space corresponding to each other in the plurality of first metal electrodes, the plurality of second metal electrodes, the plurality of gas supply regions, the plurality of discharge area formation regions, and the plurality of discharge spaces are defined as a first corresponding metal electrode, a second corresponding metal electrode, a corresponding gas supply region, a corresponding discharge area formation region, and a corresponding discharge space, respectively,
the first corresponding metal electrode, the second corresponding metal electrode, the corresponding gas supply region, the corresponding discharge area formation region, and the corresponding discharge space constitute one direction discharge structure along the second direction, and
the one direction discharge structure satisfies arrangement conditions (a) to (c):
(a) a region where the first corresponding metal electrode and the second corresponding metal electrode are overlapped with each other in a plan view constitutes the corresponding discharge space in the corresponding discharge area formation region;
(b) the corresponding discharge area formation region and the plurality of gas supply holes provided in the corresponding gas supply region are overlapped with each other in a plan view; and
(c) the plurality of gas supply holes provided in the corresponding gas supply region and the plurality of gas ejection holes provided below the corresponding discharge area formation region sandwich the corresponding discharge space in a plan view, and are disposed to face each other on a one-to-one basis along the first direction.
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