US 12,354,838 B2
Plasma generating device
Sae Hoon Uhm, Hwaseong-si (KR); Yun Seong Lee, Daejeon (KR); Yeong Hoon Sohn, Daejeon (KR); Se Hong Park, Daejeon (KR); and Ji Hoon Kim, Daejeon (KR)
Assigned to EN2CORE TECHNOLOGY INC., Daejeon (KR)
Filed by EN2CORE TECHNOLOGY INC., Daejeon (KR)
Filed on Dec. 26, 2022, as Appl. No. 18/146,423.
Application 18/146,423 is a continuation of application No. PCT/KR2021/008035, filed on Jun. 25, 2021.
Claims priority of application No. 10-2020-0078516 (KR), filed on Jun. 26, 2020; and application No. 10-2021-0033623 (KR), filed on Mar. 15, 2021.
Prior Publication US 2023/0136018 A1, May 4, 2023
Int. Cl. H01J 37/32 (2006.01); H03H 7/38 (2006.01); H05H 1/24 (2006.01)
CPC H01J 37/3211 (2013.01) [H01J 37/32165 (2013.01); H01J 37/32183 (2013.01); H01J 37/32348 (2013.01); H01J 37/32357 (2013.01); H01J 37/32844 (2013.01); H03H 7/38 (2013.01); H05H 1/246 (2021.05); H05H 1/2465 (2021.05); H01J 2237/335 (2013.01); H05H 2245/17 (2021.05)] 20 Claims
OG exemplary drawing
 
1. An antenna module coupled to a dielectric tube and receiving a power from a power supply, the antenna module comprising:
a multi-layer coil structure including a first end, a second end, and a first coil structure to an Nth coil structure electrically interposed between the first end and the second end, wherein:
N is a natural number greater than or equal to 2,
each of the first coil structure to the Nth coil structure includes two or more turns, the two or more turns comprise an innermost turn and an outermost turn,
the first coil structure to the Nth coil structure are on respective first to Nth planes, and the first to Nth planes are parallel to but different from each other, and
the multi-layer coil structure further includes a first inter-layer capacitor to an Mth inter-layer capacitor, wherein the first coil structure to the Nth coil structure and the first inter-layer capacitor to the Mth inter-layer capacitor alternate in series such that the first inter-layer capacitor is electrically connected between the first coil structure and the second coil structure, and so on until the Mth inter-layer capacitor is electrically connected between the N−1th coil structure and the Nth coil structure, and M is equal to N−1;
a first terminal capacitor electrically connected between the first end and a first terminal of the power supply, wherein the innermost turn of the first coil structure is at the first end; and
a second terminal capacitor electrically connected between the second end and a second terminal of the power supply, wherein the outermost turn of the Nth coil structure is at the second end; wherein
the first terminal capacitor has a first capacitance and the second terminal capacitor has a second capacitance, and
the first capacitance is greater than the second capacitance,
each of the first inter-layer capacitor to the Mth inter-layer capacitor has a third capacitance, and
a sum of (i) a reciprocal of the first capacitance and (ii) a reciprocal of the second capacitance has a same value as a reciprocal of the third capacitance, such that, when the antenna module receives the power, an absolute value of an electric potential with respect to ground is minimal on the innermost turn of the two or more turns in each of the first coil structure to the Nth coil structure.