US 12,354,833 B2
Multiple landing energy scanning electron microscopy systems and methods
Wei Fang, Milpitas, CA (US); Weiming Ren, San Jose, CA (US); and Zhong-wei Chen, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/630,455
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Jul. 18, 2020, PCT No. PCT/EP2020/070395
§ 371(c)(1), (2) Date Jan. 26, 2022,
PCT Pub. No. WO2021/018643, PCT Pub. Date Feb. 4, 2021.
Claims priority of provisional application 62/879,304, filed on Jul. 26, 2019.
Prior Publication US 2022/0254599 A1, Aug. 11, 2022
Int. Cl. H01J 37/28 (2006.01); H01J 37/04 (2006.01); H01J 37/147 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/045 (2013.01); H01J 37/1474 (2013.01); H01J 37/265 (2013.01); H01J 2237/0451 (2013.01); H01J 2237/2817 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a first energy source configured to provide a first landing energy beam;
a second energy source configured to provide a second landing energy beam; and
a beam controller configured to:
selectively deliver one of the first and second landing energy beams towards a field of view by selecting a mode of operation from among modes of operation of the system, wherein the modes of operation comprise:
an interlaced scan mode that interlaces, in the field of view, scan lines based on the first landing energy beam and scan lines based on the second landing energy beam; and
an other scan mode that first scans the field of view using the first landing energy beam and then scans the field of view using the second landing energy beam; and
switch between delivery of the first and second landing energy beams according to the interlaced scan mode or the other scan mode.