US 12,354,832 B2
High voltage plasma control
Timothy Ziemba, Bainbridge Island, WA (US); and Kenneth Miller, Seattle, WA (US)
Assigned to Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed by Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed on Sep. 28, 2023, as Appl. No. 18/477,174.
Claims priority of provisional application 63/411,600, filed on Sep. 29, 2022.
Prior Publication US 2024/0120170 A1, Apr. 11, 2024
Int. Cl. H01J 37/24 (2006.01); H01J 37/32 (2006.01); H01J 49/24 (2006.01); H02M 3/335 (2006.01)
CPC H01J 37/241 (2013.01) [H01J 37/32422 (2013.01); H02M 3/33573 (2021.05)] 18 Claims
OG exemplary drawing
 
1. A high voltage pulsing power supply system comprising:
a DC power supply;
a switch circuit electrically coupled with the DC power supply, the switch circuit comprising a plurality of switch modules arranged in a full bridge configuration, the switching circuit produces a plurality of pulses having a positive pulse portion, a negative pulse portion, and an amplitude greater than about 10 kV;
a transformer comprising:
a transformer core;
a primary windings wound around the transformer core; and
a secondary winding wound around the transformer core;
a droop control circuit electrically coupled with the switch circuit and the primary winding, the droop control circuit comprising:
a droop diode electrically coupled in series between the switch circuit and the primary winding that allows the negative pulse portion of the plurality of pulses to pass from the switching circuit to the primary winding of the transformer; and
a droop inductor and a droop element arranged in series across the droop diode that allows the negative pulse portion of the plurality of pulses to pass from the switching circuit to the primary winding of the transformer and stores energy from the negative pulse portion of the plurality of pulses; and
an energy recovery circuit electrically coupled with the droop element and the high voltage power supply and comprising one or more switch modules that open and close to add or remove charge to or from the droop element, wherein the one or more switch modules are arranged in a full bridge or half bridge configuration; and
an output electrically coupled with the secondary winding that outputs the plurality of pulses with a substantially flat negative pulse portion.