US 12,354,830 B2
Sample image display system and charged particle beam apparatus
Wei Chean Tan, Tokyo (JP); Hiroyuki Chiba, Tokyo (JP); Ryo Komatsuzaki, Tokyo (JP); and Hirofumi Sato, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/640,210
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Sep. 4, 2019, PCT No. PCT/JP2019/034781
§ 371(c)(1), (2) Date Mar. 3, 2022,
PCT Pub. No. WO2021/044544, PCT Pub. Date Mar. 11, 2021.
Prior Publication US 2022/0336184 A1, Oct. 20, 2022
Int. Cl. H01J 37/22 (2006.01); G01N 23/2251 (2018.01)
CPC H01J 37/222 (2013.01) [G01N 23/2251 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A sample image display system configured to display, on a screen,
a plurality of images of a sample, and
a symbol corresponding to each of the images, wherein
each of the symbols is configured to be displayed in a different mode according to a detection result related to the corresponding image, and
each of the symbols is configured to be displayed in a different color according to the detection result.