US 12,354,827 B2
Aberration correcting device and electron microscope
Shigeyuki Morishita, Tokyo (JP); and Hidetaka Sawada, Tokyo (JP)
Assigned to JEOL Ltd., Tokyo (JP)
Filed by JEOL Ltd., Tokyo (JP)
Filed on Feb. 15, 2023, as Appl. No. 18/169,270.
Claims priority of application No. 2022-025844 (JP), filed on Feb. 22, 2022.
Prior Publication US 2023/0268155 A1, Aug. 24, 2023
Int. Cl. H01J 37/153 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/153 (2013.01) [H01J 37/28 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An aberration correcting device comprising:
a first multipole which generates a hexapole field;
a second multipole which generates a hexapole field with a polarity opposite to a polarity of the hexapole field generated by the first multipole;
a third multipole which is disposed between the first multipole and the second multipole and generates an octupole field;
a first transfer lens system disposed between the first multipole and the third multipole; and
a second transfer lens system disposed between the third multipole and the second multipole,
wherein the first transfer lens system includes a plurality of fourth multipoles which generate a field in which an electromagnetic-field superposed quadrupole field and an octupole field are superposed; and
wherein the second transfer lens system includes a plurality of fifth multipoles which generate a field in which an electromagnetic-field superposed quadrupole field and an octupole field are superposed.