US 12,354,826 B2
Charged particle beam apparatus
Tomonori Nakano, Tokyo (JP); Yu Yamazawa, Tokyo (JP); and Hideo Kashima, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/603,255
Filed by HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
PCT Filed Apr. 19, 2019, PCT No. PCT/JP2019/016888
§ 371(c)(1), (2) Date Oct. 12, 2021,
PCT Pub. No. WO2020/213171, PCT Pub. Date Oct. 22, 2020.
Prior Publication US 2022/0199356 A1, Jun. 23, 2022
Int. Cl. H01J 37/153 (2006.01); H01J 37/06 (2006.01); H01J 37/09 (2006.01); H01J 37/141 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/153 (2013.01) [H01J 37/06 (2013.01); H01J 37/09 (2013.01); H01J 37/141 (2013.01); H01J 37/28 (2013.01); H01J 2237/1534 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A charged particle beam apparatus, comprising:
an electron gun that emits a primary electron beam;
an aberration corrector that includes a plurality of stages of multi-pole lenses to which the primary electron beam is incident;
an objective lens to which the primary electron beam passing through the aberration corrector is incident; and
a vacuum container that accommodates the electron gun, the aberration corrector, and the objective lens, wherein
the multi-pole lens includes a magnetic core, a plurality of current lines, a plurality of wire-shaped electrodes, an insulating electrode fixing portion for fixing the plurality of electrodes to a structure in the vacuum container, and a conductive shield set to a reference potential, which is provided between the electrode fixing portion and a central axis of the magnetic core,
main line portions of the plurality of current lines are arranged axisymmetrically with respect to the central axis of the magnetic core along an inner wall of the magnetic core, and
portions of the plurality of electrodes extending along the central axis of the magnetic core are arranged axisymmetrically with respect to the central axis of the magnetic core.