US 12,353,136 B2
Flow cell coating methods
Neil Brahma, San Diego, CA (US); Tyler J. Dill, San Diego, CA (US); Michelle Kate Fu, San Diego, CA (US); Brian A. Hanos, Carlsbad, CA (US); Sahngki Hong, San Diego, CA (US); Brinda Kodira Cariappa, San Diego, CA (US); and Lewis J. Kraft, San Diego, CA (US)
Assigned to Illumina, Inc., San Diego, CA (US)
Filed by ILLUMINA, INC., San Diego, CA (US)
Filed on Dec. 14, 2021, as Appl. No. 17/550,681.
Claims priority of provisional application 63/125,716, filed on Dec. 15, 2020.
Prior Publication US 2022/0187710 A1, Jun. 16, 2022
Int. Cl. G03F 7/20 (2006.01); G01N 21/64 (2006.01); G03F 7/16 (2006.01); C12Q 1/6874 (2018.01); G03F 7/038 (2006.01)
CPC G03F 7/2022 (2013.01) [G01N 21/6428 (2013.01); G01N 21/6456 (2013.01); G03F 7/168 (2013.01); C12Q 1/6874 (2013.01); G01N 2021/6439 (2013.01); G03F 7/038 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A method, comprising:
applying a water-soluble protective coating solution over a bonding region and over either i) a patterned region of a patterned structure, the patterned region including depressions having at least a polymeric hydrogel therein, and interstitial regions separating the depressions or ii) a lane region of a non-patterned structure, the lane region including a lane having at least the polymeric hydrogel therein;
drying the water-soluble protective coating solution to form a solid coating or a gel coating over the bonding region and over either i) the patterned region or ii) the lane region;
after drying the water-soluble protective coating solution:
applying a photoresist over the solid coating or the gel coating; and
patterning the photoresist to remove the photoresist from portions of the solid coating or the gel coating over the bonding region and to generate an insoluble photoresist over other portions of the solid coating or the gel coating over either i) the patterned region or ii) the lane region; and
selectively removing the portions of the solid coating or the gel coating from the bonding region while leaving the other portions of the solid coating or the gel coating over either i) the patterned region or ii) the lane region.