US 12,353,009 B2
Total or local thickness variation for optical devices
Yingdong Luo, Newark, CA (US); Zhengping Yao, Cupertino, CA (US); Daihua Zhang, Los Altos, CA (US); David Alexander Sell, Santa Clara, CA (US); Jingyi Yang, Santa Clara, CA (US); Xiaopei Deng, San Jose, CA (US); Kevin Messer, Mountain View, CA (US); Samarth Bhargava, Saratoga, CA (US); Rami Hourani, Santa Clara, CA (US); and Ludovic Godet, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 8, 2024, as Appl. No. 18/629,636.
Application 18/629,636 is a continuation of application No. 18/381,604, filed on Oct. 18, 2023.
Claims priority of provisional application 63/380,003, filed on Oct. 18, 2022.
Prior Publication US 2024/0295693 A1, Sep. 5, 2024
Int. Cl. G02B 6/122 (2006.01); G02B 6/12 (2006.01); G02B 6/124 (2006.01); G02B 6/13 (2006.01); G02B 27/00 (2006.01)
CPC G02B 6/1228 (2013.01) [G02B 6/12004 (2013.01); G02B 6/124 (2013.01); G02B 6/13 (2013.01); G02B 27/0081 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A waveguide, comprising:
a waveguide substrate; and
an index-matched layer having:
a first surface disposed on a first surface of the waveguide substrate; and
a second surface opposing the first surface of the index-matched layer,
wherein:
the index-matched layer is disposed over a portion of the waveguide substrate;
a slope of the first surface of the waveguide substrate is continuously varied across the portion; and
a thickness of the index-matched layer is varied to achieve a target thickness of the index-matched layer and the waveguide substrate across the portion.