US 12,353,004 B2
Waveguide escalators for a photonics chip
Yusheng Bian, Ballston Lake, NY (US); Kevin Dezfulian, Arlington, VA (US); Kenneth Giewont, Hopewell Junction, NY (US); and Karen Nummy, Newburgh, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Feb. 28, 2023, as Appl. No. 18/115,046.
Prior Publication US 2024/0288631 A1, Aug. 29, 2024
Int. Cl. G02B 6/12 (2006.01); G02B 6/136 (2006.01)
CPC G02B 6/12004 (2013.01) [G02B 6/12002 (2013.01); G02B 2006/12061 (2013.01); G02B 6/136 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure comprising:
a first waveguide core including a section; and
a back-end-of-line stack including a first dielectric layer, a second dielectric layer on the first dielectric layer, an opening in the second dielectric layer, a second waveguide core including a section that overlaps with the section of the first waveguide core, and a plurality of third waveguide cores arranged in a vertical direction between the first waveguide core and the second waveguide core, the plurality of third waveguide cores positioned inside the opening in the second dielectric layer, the first dielectric layer comprising a first material with a first refractive index, and the second dielectric layer comprising a second material with a second refractive index different from the first refractive index.