US 12,352,992 B2
Optical filter
Hideaki Takahoshi, Tokyo (JP); Kazuya Takemoto, Tokyo (JP); and Keisuke Kawai, Tokyo (JP)
Assigned to AGC Inc., Tokyo (JP)
Filed by AGC Inc., Tokyo (JP)
Filed on Sep. 16, 2022, as Appl. No. 17/932,849.
Claims priority of application No. 2021-159993 (JP), filed on Sep. 29, 2021.
Prior Publication US 2023/0103350 A1, Apr. 6, 2023
Int. Cl. G02B 5/28 (2006.01); G02B 5/20 (2006.01)
CPC G02B 5/282 (2013.01) [G02B 5/208 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An optical filter, comprising:
a substrate; and
a dielectric multilayer film laid on or above at least one major surface of the substrate, the dielectric multilayer film comprising at least two different layers,
wherein:
the dielectric multilayer film comprises a film having a spin density of 5.0×1010/nm·cm2 or larger,
a surface on a dielectric multilayer film side has a nanoindentation hardness of 5.5 GPa or higher when a measurement load is 1 mN,
a maximum transmittance at an incident angle of 0° in a wavelength range of 400 nm to 680 nm is 6% or lower,
a maximum reflectance at an incident angle of 5° in the wavelength range of 400 nm to 680 nm is 20% or lower, and
an average transmittance at an incident angle of 0° in at least one wavelength range having a width of 50 nm included in a wavelength range of 800 nm to 1,580 nm is 90% or higher.