US 12,352,942 B2
Confocal scanner and confocal microscope
Takayuki Kei, Musashino (JP); and Naoki Andoh, Musashino (JP)
Assigned to Yokogawa Electric Corporation, Tokyo (JP)
Filed by Yokogawa Electric Corporation, Musashino (JP)
Filed on Feb. 4, 2022, as Appl. No. 17/592,654.
Claims priority of application No. 2021-041637 (JP), filed on Mar. 15, 2021.
Prior Publication US 2022/0291494 A1, Sep. 15, 2022
Int. Cl. G02B 21/00 (2006.01); G02B 27/14 (2006.01); G02B 27/28 (2006.01); G02B 27/30 (2006.01)
CPC G02B 21/0044 (2013.01) [G02B 21/0032 (2013.01); G02B 21/0068 (2013.01); G02B 27/141 (2013.01); G02B 27/283 (2013.01); G02B 27/30 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A confocal scanner comprising:
a first disk which comprises a plurality of microlenses;
a second disk which comprises a plurality of pinholes formed to be associated with the microlenses, wherein one surface of the first disk faces another surface of the second disk, and the second disk rotates together with the first disk;
a light guider which forms a Koehler illumination system having a Fourier lens together with microlenses within a first region set in the first disk, wherein the light guider guides a plurality of rays of split light split by the microlenses within the first region to a second region set in the first disk; and
a beam splitter which is disposed between the one surface of the first disk and the another surface of the second disk, wherein light which has passed through microlenses within the second region transmits through the beam splitter, and the beam splitter reflects light incident from the second disk toward an outward side of the first disk and the second disk in a radial direction.