US 12,352,832 B2
Reducing angle error in angle sensor due to orthogonality drift over magnetic-field
Samridh Jaiswal, London (GB); Paolo Campiglio, Arcueil (FR); Ronald Lehndorff, Mainz (DE); and Yen Ting Liu, Hsinchu (TW)
Assigned to Allegro MicroSystems, LLC, Manchester, NH (US)
Filed by Allegro MicroSystems, LLC, Manchester, NH (US)
Filed on Jan. 30, 2023, as Appl. No. 18/161,145.
Prior Publication US 2024/0255592 A1, Aug. 1, 2024
Int. Cl. G01R 33/09 (2006.01); G01B 7/30 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/091 (2013.01) [G01B 7/30 (2013.01); G01R 33/093 (2013.01); G01R 33/096 (2013.01); G01R 33/098 (2013.01); G01R 33/0052 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method for manufacturing a magnetic field sensor, the method comprising:
forming, on a substrate, a cosine bridge, the forming of the cosine bridge including forming a first magnetoresistance (MR) element, the first MR element being formed by: (i) depositing on the substrate 1/n of a total of a magnetic material of a first magnetic layer, (ii) rotating the substrate by 360°/n after depositing 1/n of the total of the magnetic material of magnetic layer, (iii) depositing on the substrate an additional 1/n of the total of the magnetic material of the first magnetic layer, (iv) rotating the substrate by 360°/n after depositing the additional 1/n of the total of the magnetic material of the first magnetic layer, wherein n is an integer greater than 2, and steps (iii), and (iv) are repeated until the total of the magnetic material of the first magnetic layer is deposited; and
forming, on the substrate, a sine bridge, the forming of the sine bridge including forming a second MR element.