US 12,352,800 B2
Apparatus and method for measuring dynamic on-resistance of nitride-based switching device
Chang Chen, Suzhou (CN)
Assigned to INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD., Suzhou (CN)
Appl. No. 17/778,024
Filed by INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD., Suzhou (CN)
PCT Filed Mar. 3, 2022, PCT No. PCT/CN2022/079106
§ 371(c)(1), (2) Date Sep. 7, 2023,
PCT Pub. No. WO2023/164900, PCT Pub. Date Sep. 7, 2023.
Prior Publication US 2024/0168079 A1, May 23, 2024
Int. Cl. G01R 31/26 (2020.01); G01R 7/02 (2006.01); G01R 15/04 (2006.01); G01R 19/00 (2006.01); G01R 27/02 (2006.01); G01R 27/08 (2006.01); G01R 31/52 (2020.01)
CPC G01R 31/2621 (2013.01) [G01R 7/02 (2013.01); G01R 31/2601 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An apparatus for measuring dynamic on-resistance of a nitride-based device under test (DUT) comprising a control terminal connected to a controller being configured to generate a control signal to switch on and off the DUT, the apparatus comprising:
an input interface comprising a first input node configured for being electrically connected to a first conduction terminal of the DUT, a second input node configured for being electrically connected to a second conduction terminal of the DUT;
an output interface comprising a first output node configured for being electrically connected to a first signal input node of an electrical signal monitoring equipment and a second output node connected configured for being electrically connected to a second signal input node of the electrical signal monitoring equipment, and the second output node being connected to the second input node;
a first clamping module comprising a control terminal, a first conduction terminal electrically connected to the first input node, and a second conduction terminal electrically coupled to the first output node;
a second clamping module comprising a first terminal electrically connected to the first output node, and a second terminal electrically connected to the second output node; and
a driving module comprising an input terminal electrically connected to the first input node and an output terminal electrically connected to the control terminal of the first clamping module; and
wherein the driving module is configured to:
sense a state change of the DUT; and
generate a control signal to switch on and off the first clamping module based on the state change of the DUT such that when the DUT is at an on-state, an output voltage across the first and second output nodes is clamped to indicate a drain-source voltage of the DUT.