| CPC G01N 21/8803 (2013.01) [G01N 21/8851 (2013.01); G01N 2201/0245 (2013.01)] | 20 Claims |

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1. A protective sheet fixing jig for fixing a protective sheet placed on a stage, the protective sheet fixing jig comprising:
an upper plate which presses the protective sheet on the stage and tightly fixes the protective sheet to the stage;
a post disposed at a side of the stage and connected with the upper plate;
a bracket facing the upper plate and connected with the post; and
a fixing part which is fastened to the bracket and presses a lower surface of the stage.
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