US 12,352,692 B2
Dynamic process end point detection
ChangMeng Hsiung, Redwood City, CA (US); Lan Sun, Santa Rosa, CA (US); Edward Gooding, Hopewell, NJ (US); and Michael Klimek, Santa Rosa, CA (US)
Assigned to VIAVI Solutions Inc., Chandler, AZ (US)
Filed by VIAVI Solutions Inc., Chandler, AZ (US)
Filed on Feb. 2, 2023, as Appl. No. 18/163,712.
Application 18/163,712 is a continuation in part of application No. 17/646,038, filed on Dec. 27, 2021, granted, now 11,860,035.
Claims priority of provisional application 63/267,531, filed on Feb. 3, 2022.
Prior Publication US 2023/0204502 A1, Jun. 29, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01J 3/02 (2006.01); G01N 1/38 (2006.01); G01N 21/3577 (2014.01); G01N 21/359 (2014.01); G01N 33/15 (2006.01)
CPC G01N 21/3577 (2013.01) [G01N 1/38 (2013.01); G01N 21/359 (2013.01); G01N 33/15 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving, by a device, spectroscopic data associated with a dynamic process;
identifying, by the device, a pseudo steady state end point based on the spectroscopic data, the pseudo steady state end point indicating an end of a pseudo steady state associated with the dynamic process;
identifying, by the device, a reference block and a test block from the spectroscopic data based on the pseudo steady state end point;
generating, by the device, a raw detection signal associated with the reference block and a raw detection signal associated with the test block;
generating, by the device, an averaged statistical detection signal based on the raw detection signal associated with the reference block and the raw detection signal associated with the test block; and
determining, by the device, whether the dynamic process has reached a steady state based on the averaged statistical detection signal.