| CPC G01L 1/16 (2013.01) [G01L 5/0061 (2013.01)] | 5 Claims |

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1. A sensor unit of a machining device comprising:
a piezoelectric sensor having a wire shape;
a measurement part including an abutting surface formed with a guide groove that holds a part of the piezoelectric sensor and abutting a measurement object at predetermined pressure; and
a cushioning holding part that holds, in a buffered state, another part of the piezoelectric sensor located outside the abutting surfaces.
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