US 12,352,628 B2
Apparatus for measuring the polarization of an electromagnetic radiation and corresponding method of use
Antonio Caretta, Trieste (IT); Simone Laterza, Trieste (IT); and Marco Malvestuto, Duino-Aurisina (IT)
Assigned to ELETTRA—SINGCROTRONE TRIESTE S.C.P.A., Trieste (IT)
Appl. No. 18/282,431
Filed by ELETTRA—SINCROTRONE TRIESTE S.C.P.A, Trieste (IT)
PCT Filed Feb. 25, 2022, PCT No. PCT/IT2022/050036
§ 371(c)(1), (2) Date Sep. 15, 2023,
PCT Pub. No. WO2022/195635, PCT Pub. Date Sep. 22, 2022.
Claims priority of application No. 102021000006434 (IT), filed on Mar. 18, 2021.
Prior Publication US 2024/0183715 A1, Jun. 6, 2024
Int. Cl. G01J 4/04 (2006.01); G02B 7/182 (2021.01)
CPC G01J 4/04 (2013.01) [G02B 7/1824 (2013.01)] 13 Claims
OG exemplary drawing
 
1. Apparatus for measuring the polarization of a radiation in the Extreme Ultraviolet (EUV), comprising a source of said electromagnetic radiation and a polarimeter;
wherein said polarimeter has two mirrors positioned according to two planes of incidence orthogonal to each other, a first plane of incidence of said planes being defined as the plane identified by an axis of said radiation, incident on a first of said mirrors, and the normal to the surface of said first mirror, wherein said first mirror comprises an edge of incidence positioned in correspondence with said axis in order to divide said radiation into two equal parts, reflect a first part of radiation and transmit a second part of radiation toward the second of said mirrors, which is able to reflect said second part, both mirrors being positioned in correspondence with the Brewster's angle with respect to said respective parts of radiation; and
wherein said polarimeter comprises one detector positioned in such a way that said first part of the radiation is incident on it, and another detector positioned in such a way that the reflected part, on the second of said mirrors, of said second part of the radiation is incident on it, said detectors being configured to generate a respective electrical signal and to transmit it to a processing apparatus.