US 12,352,610 B2
Flow rate measurement device
Yasuhisa Ito, Ise (JP); and Shinji Onishi, Ise (JP)
Assigned to Murata Machinery, Ltd., Kyoto (JP)
Appl. No. 18/028,230
Filed by Murata Machinery, Ltd., Kyoto (JP)
PCT Filed Aug. 13, 2021, PCT No. PCT/JP2021/029840
§ 371(c)(1), (2) Date Mar. 24, 2023,
PCT Pub. No. WO2022/074937, PCT Pub. Date Apr. 14, 2022.
Claims priority of application No. 2020-168369 (JP), filed on Oct. 5, 2020.
Prior Publication US 2024/0192041 A1, Jun. 13, 2024
Int. Cl. G01F 15/18 (2006.01)
CPC G01F 15/18 (2013.01) 8 Claims
OG exemplary drawing
 
1. A flow rate measurement device configured to measure a flow rate of purge gas in a purge device configured to supply the purge gas to a container including a bottom lid configured to be attached to and detached from a container body, the flow rate measurement device comprising:
a base on which a flow-rate measurer is mounted;
an engaged part provided in the base and configured to be engaged with the bottom lid; and
a flow passage through which the purge gas injected from an injection port of the bottom lid is circulated to the flow-rate measurer when the engaged part is engaged with the bottom lid.