US 12,351,939 B2
Ingot growing apparatus and method thereof
Hyun Woo Park, Gumi-si (KR)
Assigned to SK SILTRON CO., LTD., Gumi-si (KR)
Filed by SK SILTRON CO., LTD., Gumi-si (KR)
Filed on Feb. 22, 2023, as Appl. No. 18/172,900.
Claims priority of application No. 10-2022-0029142 (KR), filed on Mar. 8, 2022.
Prior Publication US 2023/0287593 A1, Sep. 14, 2023
Int. Cl. C30B 15/20 (2006.01); G06N 3/08 (2023.01)
CPC C30B 15/206 (2013.01) [G06N 3/08 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An ingot growing apparatus for growing an ingot in the order of a neck portion, a shoulder portion, a body portion, and a tail portion, comprising:
a memory configured to store an artificial neural network; and
a processor,
wherein the processor is configured:
to learn the artificial neural network to obtain a primary shoulder shape model corresponding to training data,
to update the obtained primary shoulder shape model based on shoulder information obtained during the growth of a shoulder portion of a first ingot to obtain a secondary shoulder shape model,
to set a target tail temperature for growth of a tail portion of the first ingot based on the secondary shoulder shape model,
to control the growth of the tail portion of the first ingot according to the set target tail temperature,
to generate a primary tail shape model based on tail shape image data obtained when the tail portion of the first ingot is grown,
to update the primary tail shape model based on tail information obtained when a tail portion of a second ingot is grown to obtain a secondary tail shape model,
to set a target shoulder temperature for growth of a shoulder portion of a third ingot based on the secondary tail shape model, and
to control the growth of the shoulder portion of the third ingot according to the set target shoulder temperature.