US 12,351,921 B2
Distribution body for a process fluid for chemical and/or electrolytic surface treatment of a substrate
Andreas Gleissner, Döbriach (AT); Philipp Engesser, Villach (AT); and Harald Okorn-Schmidt, Klagenfurt (AT)
Assigned to SEMSYSCO GMBH, Salzburg (AT)
Appl. No. 17/778,745
Filed by SEMSYSCO GMBH, Salzburg (AT)
PCT Filed Nov. 18, 2020, PCT No. PCT/EP2020/082542
§ 371(c)(1), (2) Date May 20, 2022,
PCT Pub. No. WO2021/099389, PCT Pub. Date May 27, 2021.
Claims priority of application No. 19211049 (EP), filed on Nov. 22, 2019.
Prior Publication US 2023/0026551 A1, Jan. 26, 2023
Int. Cl. C23F 1/08 (2006.01); C25D 5/08 (2006.01); C25D 7/12 (2006.01); C25D 17/00 (2006.01); C25D 21/10 (2006.01)
CPC C23F 1/08 (2013.01) [C25D 5/08 (2013.01); C25D 7/12 (2013.01); C25D 17/00 (2013.01); C25D 21/10 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A distribution body for a process fluid for chemical and/or electrolytic surface treatment of a substrate, comprising:
a front face,
a rear face,
at least an inlet,
an outlet array,
a flow control array, and
at least one connecting passage,
wherein the front face is configured to be directed towards the substrate for the surface treatment of the substrate,
wherein the rear face is arranged opposite to the front face,
wherein the inlet is configured for an entry of the process fluid into the distribution body,
wherein the outlet array comprises several outlets, which are configured for an exit of the process fluid out of the distribution body and towards the substrate,
wherein the flow control array is arranged upstream of the outlet array with respect to a flow of the process fluid,
wherein the flow control array comprises several flow control elements arranged to equilibrate the flow of the process fluid towards the outlets, and
wherein the flow control array is arranged adjacent to one of the at least one connecting passage.