US 12,351,916 B2
Gas showerhead with controllable airflow distribution
Zhenjie Liu, Shenyang (CN); Xue Liu, Shenyang (CN); Zhi Chai, Shenyang (CN); and Guangjie Qi, Shenyang (CN)
Assigned to Piotech Inc., Shenyang (CN)
Filed by Piotech Inc., Shenyang (CN)
Filed on Dec. 29, 2021, as Appl. No. 17/564,387.
Claims priority of application No. 202011643092.7 (CN), filed on Dec. 31, 2020.
Prior Publication US 2022/0205101 A1, Jun. 30, 2022
Int. Cl. C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/45565 (2013.01) [C23C 16/45589 (2013.01); C23C 16/4584 (2013.01); C23C 16/52 (2013.01); H01J 37/32449 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A gas showerhead with controllable airflow distribution, the gas showerhead being disposed in a cavity of a thin film deposition device, the gas showerhead comprising:
a first-layer panel comprising a plurality of first gas supply holes distributed according to a first rule, the first-layer panel being immovable; and
a second-layer panel seated on the first-layer panel and comprising a plurality of second gas supply holes distributed according to a second rule, wherein:
the first rule is different from the second rule,
the second-layer panel is capable of rotating relative to the first-layer panel between a first position and a second position that are different relative to each other,
at the first position, none of the plurality of first gas supply holes are covered by the second-layer panel,
at the second position, a portion of the plurality of first gas supply holes are aligned with the corresponding second gas supply holes and an other portion of the plurality of first gas supply holes are covered by the second-layer panel,
the gas showerhead further comprising a first rotating device for rotating the second-layer panel, the first rotating device being adjacent to an edge of the second-layer panel,
the first rotating device comprising:
a rotating column that is configured to rotate; and
a control column fixedly connected to or integrally formed with the rotating column,
the second-layer panel further comprises a lug extending outward from the edge of the second-layer panel, the lug defining an elongated slot that matches the control column,
the first-layer panel further comprises an annular peripheral wall extending upward from an edge of the first-layer panel,
an inner side of the annular peripheral wall defining a first notch that faces inward,
the rotating column, the control column, and the lug are each within the first notch, and
a width of the first notch is greater than a width of the lug.