US 12,351,915 B2
Porous inlet
Marko Pudas, Masala (FI); and Juhana Kostamo, Masala (FI)
Assigned to Picosun Oy, Espoo (FI)
Appl. No. 17/615,247
Filed by Picosun Oy, Espoo (FI)
PCT Filed Jun. 6, 2019, PCT No. PCT/FI2019/050433
§ 371(c)(1), (2) Date Nov. 30, 2021,
PCT Pub. No. WO2020/245492, PCT Pub. Date Dec. 10, 2020.
Prior Publication US 2022/0235466 A1, Jul. 28, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/45561 (2013.01) [C23C 16/45519 (2013.01); C23C 16/45544 (2013.01); C23C 16/45563 (2013.01); C23C 16/52 (2013.01); H01J 37/32449 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A substrate processing apparatus, comprising:
a reaction chamber with an inlet opening;
an in-feed line external to the reaction chamber to provide a reactive chemical into the reaction chamber via the inlet opening;
incoming gas flow control means in the in-feed line, the in-feed line extending from the flow control means to the reaction chamber, the in-feed line in this portion between the flow control means and the reaction chamber having the form of an inlet pipe with a gas-permeable wall, the inlet pipe with the gas-permeable wall extending from the flow control means towards the inlet opening through a volume at least partly surrounding the inlet pipe; and
the apparatus being configured to provide fluid to surround and enter the inlet pipe in said portion.